Effusion Cells

Designed and built in the USA our effusion cells can be configured for almost any deposition system, material or application.

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ES-1

Built on a 2.75" or 4.5" CF flange, this source is great for materials research, or as a dopant source for production. 

CRUCIBLE OPTIONS:

Conical

Cylindrical

Reduced aperture

reduced aperture xl

A variety of conical, cylindrical, reduced aperture and custom PBN or graphite crucibles available for almost any application or material.

ES-2

Built on a 4.5" CF in flange this source can be widely used in research and production operations. 

DESIGN OPTIONS:

  • Single/Dual temp zones.
  • Integrated watercooling.
  • Integrated/automated shutter.
  • Ammonia or oxygen resistant designs.
  • Low/High temp designs.
  • Hot/Cold lip designs.
  • Linear source options.
  • Custom source designs.
  • Ask about cracking or valved options.

ES-3

Built on a 6" CF flange this source is developed for use in production MBE systems.                                     

MATERIAL OPTIONS:

  • Aluminum (Al)
  • Gallium (Ga)
  • Indium (In)
  • Thallium (Tl)
  • Silicon (Si)
  • Germanium (Ge)
  • Tin (Sn)
  • And more!

Custom deposition sources and components for material science research and semiconductor manufacturing available.